Journal Article

·2007

Synthesis of β-FeSi2/Si heterojunctions for photovoltaic applications by unbalanced magnetron sputtering

Beyhan Tatar YTU , Kubilay Kutlu YTU , Mustafa Ürgen YTU

Thin Solid Films

No open-access abstract is available for this article. Use the DOI link on the right to read the full text.

Keywords

Heterojunction Sputter deposition Materials science Sputtering Optoelectronics Silicon Raman spectroscopy Silicide Thin film Cavity magnetron Nanotechnology Optics

Subject Areas

Semiconductor materials and interfaces ·Atomic and Molecular Physics, and Optics ·Physical Sciences
Integrated Circuits and Semiconductor Failure Analysis ·Electrical and Electronic Engineering ·Physical Sciences
Semiconductor materials and devices ·Electrical and Electronic Engineering ·Physical Sciences

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